Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane 

Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, Jinho Ahn, Membranes, 13(1), 21 December, 5 (2022) 

Near-feld infrared nanoscopic study of EUV and e-beam-exposed hydrogen silsesquioxane photoresist 

Jiho Kim, Jin-Kyun Lee, Boknam Chae, Jinho Ahn, Sangsul Lee, Nano Convergence, 9(53), 02 December (2022)

Effect of wrinkles on extreme ultraviolet pellicle reflectivity and local critical dimension

Dong Gi Lee, Young Woong Kim, Seungchan Moon, and Jinho Ahn, Applied Optics, 61(20), 05 July, 5965-5971 (2022)

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Atomic layer etching of SiO2 using trifluoroiodomethane

Seon Yong Kim, In-Sung Park, and Jinho Ahn, Applied Surface Science, 589, 01 July, 153045 (2022)

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Actinic patterned mask imaging using extreme ultraviolet ptychography microscope with high harmonic generation source

Young Woong Kim, Dong Gi Lee, Seungchan Moon, Chang Mo Ku, Joong Hwee Cho and Jinho Ahn, Applied Physics Express, 15(7), 17 June, 076505 (2022)

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Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho, and Jinho Ahn, Membranes, 12(4), 26 March, 367 (2022)

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High wet etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane

Su Min Hwang, Harrison Sejoon Kim, Dan N. Le, Akshay Sahota, Jaebeom Lee, Yong Chan Jung, Sang Woo Kim, Si Joon Kim, Rino Choi, Jinho Ahn, Byung Keun Hwang, Xiaobing Zhou, and Jiyoung Kim, Journal of Vacuum Science & Technology A, 40(2), 11 February, 22406 (2022)

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Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Junghwan Kim, Haneul Kim, Jinho Ahn, Journal of Micro/Nanopatterning, MEMS, and MOEMS, 21(1), 01 February, 14401 (2022)

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Microstructures of HfOx Films Prepared via Atomic Layer Deposition Using La(NO3)3·6H2O Oxidants

Seon Yong Kim, Yong Chan Jung, Sejong Seong, Taehoon Lee, In-Sung Park and Jinho Ahn, Materials, 14(23), 06 December, 7478 (2021)

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Highly Reliable Selection Behavior with Controlled Ag Doping of Nano-polycrystalline ZnO Layer for 3D X-Point Framework

Akshay Sahota, Harrison Sejoon Kim, Jaidah Mohan, Yong Chan Jung, Heber Hernandez-Arriaga, Dan N Le, Si Joon Kim, Jang-Sik Lee, Jinho Ahn, Jiyoung Kim, IEEE Electron Device Letters, 43(1), 25 November, 21-24 (2021)

Nano-polycrystalline Ag-doped ZnO layer for steep-slope threshold switching selectors

Akshay Sahota, Harrison Sejoon Kim, Jaidah Mohan, Dan N Le, Yong Chan Jung, Si Joon Kim, Jang-Sik Lee, Jinho Ahn, Heber Hernandez-Arriaga, Jiyoung Kim, AIP Advances, 11(11), 05 November, 115213 (2021)

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Highly Efficient Bifacial Color‐Tunable Perovskite Solar Cells

Jihyeon Heo, Incheol Jung, Hyunwoo Park, Ju Hwan Han, Hyeonwoo Kim, Hansol Park, Jin‐Seong Park, Hyeongtag Jeon, Kyu‐Tae Lee, Hui Joon Park

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Plasma-enhanced atomic-layer deposition of active layers of nanolaminated (InOx)n(GaZnOy)m for thin-film transistors 

Hyun-Jun Jeong, Won-Bum Lee, Jiazhen Sheng, Jun Hyung Lim* and Jin-Seong Park*  

High-Energy W-Doped Li[Ni0.95Co0.04Al0.01]O2 Cathodes for Next-Generation Electric Vehicles 

Un-Hyuck Kim, Nam-Yung Park, Geon-Tae Park, Hun Kim, Chong S. Yoon, Yang-Kook Sun, Energy Storage Materials 33, December, 399-407 (2020) 

Molecular Interaction Regulates the Performance and Longevity of Defect Passivation for Metal Halide Perovskite Solar Cells 

Yepin Zhao, Pengchen Zhu, Shu Huang, Shaun Tan, Minhuan Wang, Rui Wang, Jingjing Xue, Tae-Hee Han, Sung-Joon Lee, Anni Zhang, Tianyi Huang, Pei Cheng, Dong Meng, Jin-Wook Lee, Jaime Marian, Jia Zhu, and Yang Yang, Journal of the American Chemical Society, 142(47), 25 November, 20071-20079 (2020) 

Molecular‐Scale Strategies to Achieve High Efficiency and Low Efficiency Roll‐off in Simplified Solution‐Processed Organic Light‐Emitting Diodes 

Young‐Hoon Kim, Tae‐Hee Han, Changsoo Lee, Yun‐Hi Kim, Yang Yang, Tae‐Woo Lee, Advanced Functional Materials, 30(46), 11 November, 2005292 (2020)

Solid-phase hetero epitaxial growth of α-phase formamidinium perovskite 

Jin-Wook Lee, Shaun Tan, Tae-Hee Han, Rui Wang, Lizhi Zhang, Changwon Park, Mina Yoon, Chungseok Choi, Mingjie Xu, Michael E. Liao, Sung-Joon Lee, Selbi Nuryyeva, Chenhui Zhu, Kenny Huynh, Mark S. Goorsky, Yu Huang, Xiaoqing Pan & Yang Yang, Nature Communications 11, 02 November, Article number: 5514 (2020) 

Heuristic solution for achieving long-term cycle stability for Ni-rich layered cathodes at full depth of discharge 

Un-Hyuck Kim, Geon-Tae Park, Byoung-Ki Son, Gyeong Won Nam, Jun Liu, Liang-Yin Kuo, Payam Kaghazchi, Chong S. Yoon & Yang-Kook Sun, Nature Energy, 5(11), November, 860–869 (2020) 

Thermal Annealing of Molecular Layer-Deposited Indicone Toward Area-Selective Atomic Layer Deposition 

Seunghwan Lee, Miso Kim, GeonHo Baek, Hye-mi Kim, Tran Thi Ngoc Van, Dham Gwak, Kwang Heo, Bonggeun Shong, and Jin-Seong Park, 

ACS Applied Materials & Interfaces, 12(38), 23 September, 43212-43221 (2020) 

Metastable Rhombohedral Phase Transition of Semiconducting Indium Oxide Controlled by Thermal Atomic Layer Deposition 

Jung-Hoon Lee, Jiazhen Sheng, Hyesung An, TaeHyun Hong, Hyun You Kim, HyunKyung Lee, Jang Hyeon Seok, Jung Woo Park, Jun Hyung Lim, and Jin-Seong Park, Chemistry of Materials, 32(17), 08 September, 7404-7412 (2020)