소재·부품·장비 나노컨버전스 리더 교육연구단





Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles

Seong Ju Wi, Won Jin Kim, Haneul Kim, Dongmin Jeong, Dong Gi Lee, Jaehyuck Choi, Sang Jin Cho, Lan Yu, Jinho AhnMembranes, 13(8), 14 August (2023)



Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration 

Dong Gi Lee, Seungchan Moon, Jinhyuk Choi, Seong Ju Wi, Jinho AhnApplied Optics, 62(24), 11 August (2023) 



Tailoring thin film transistor performance through plasma reactant manipulation in indium oxynitride films 

Hyun-Mo Lee, Hye-Mi Kim, Yoon-Seo Kim & Jin-Seong ParkJournal of Materials Chemistry C, 2023 


Selectively Nitrogen Doped ALD-IGZO TFTs with Extremely High-mobility and Reliability 

Dong-Gyu Kim, Hyuk Choi, Yoon-Seo Kim, Dong-Hyeon Lee, Hye-Jin Oh, Ju Hyeok Lee, Junghwan Kim, Seunghee Lee, Bongjin Kuh, Taewon Kim, Hyun You Kim*, and Jin-Seong Park*​, ACS Applied Materials & Interfaces2023



Approaches for 3D Integration Using Plasma-Enhanced Atomic-Layer-Deposited Atomically-Ordered InGaZnO Transistors with Ultra-High Mobility 

Yoon-Seo Kim, Hye-Jin Oh, Junghwan Kim, Jun Hyung Lim, Jin-Seong ParkSmall Methods (2023): 2300549.

Insight into pulse-charging for lithium plating-free fast-charging lithium-ion batteries 

Yeon Tae Jeong, Hong Rim Shin, Jinhong Lee, Myung-Hyun Ryu, Sinho Choi, Sinho Choi, Hansung Kim, Kyu-Nam Jung, Jong-Won LeeElectrochimica Acta, 462, 10 September, 142761 (2023) 



Suppressing storage-induced degradation of Li7La3Zr2O12 via encapsulation with hydrophobicity-tailored polymer nanolayer 

Wooyoung Jeong, Hyeonseo Joo, Chaejeong Kim, Kyu-Nam Jung, Ju-Hyuck Lee, Jong-Won LeeElectrochimica Acta, 453, 10 June, 142358 (2023) 



Deciphering the critical degradation factors of solid composite electrodes with halide electrolytes: Interfacial reaction versus ionic transport

Jonghyeok Yun, Hong Rim Shin, Trung Dinh Hoang, Siwon Kim, Jae Hyuk Choi, Beomsu Kim, Hyuck Jung, Janghyuk Moon, Jong-Won LeeEnergy Storage Materials, 59, 23 April, 102787 (2023) 



Multi-scale nanofiber membrane functionalized with metal-organic frameworks for efficient filtration of both PM2.5 and CH3CHO with colorimetric NH3 detection 

Ji Hyun Lee, Hyun Ju Oh, Young Ki Park, Yoonjin Kim, Gyudong Lee, Song Jun Doh, Woosung Lee, Seon-Jin Choi*, and Ki Ro Yoon*, Chemical Engineering Journal, 464(15), 15 May, 142725 (2023) 



Temperature-Dependent n-to-p-Type Transition of 2D Mn Oxide Nanosheets toward NO2 for Flexible Gas Sensor Application

Dong-Ha Kim, Joon-Seok Lee, Hee Jung Park*, Il-Doo Kim*, and Seon-Jin Choi*, ACS Sensors, 8(1), 01 August, 280–288 (2023) 



Flexible supercapacitor with superior length and volumetric capacitance enabled by a single strand of ultra-thick carbon nanotube fiber 

Sungju Lee, Jeong-Gil Kim, Hayoung Yu, Dong-Myung Lee, Seungki Hong, Seung Min Kim, Seon-Jin Choi*, Nam Dong Kim*, and Hyeon Su Jeong*, Chemical Engineering Journal, 453(2), 01 February, 139974 (2023) 



Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane 

Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, Jinho Ahn, Membranes, 13(1), 21 December, 5 (2022) 



Near-feld infrared nanoscopic study of EUV and e-beam-exposed hydrogen silsesquioxane photoresist 

Jiho Kim, Jin-Kyun Lee, Boknam Chae, Jinho Ahn, Sangsul Lee, Nano Convergence, 9(53), 02 December (2022)



Effect of wrinkles on extreme ultraviolet pellicle reflectivity and local critical dimension

Dong Gi Lee, Young Woong Kim, Seungchan Moon, and Jinho Ahn, Applied Optics, 61(20), 05 July, 5965-5971 (2022)



Atomic layer etching of SiO2 using trifluoroiodomethane

Seon Yong Kim, In-Sung Park, and Jinho Ahn, Applied Surface Science, 589, 01 July, 153045 (2022)



Actinic patterned mask imaging using extreme ultraviolet ptychography microscope with high harmonic generation source

Young Woong Kim, Dong Gi Lee, Seungchan Moon, Chang Mo Ku, Joong Hwee Cho and Jinho Ahn, Applied Physics Express, 15(7), 17 June, 076505 (2022)



Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

Seong Ju Wi, Yong Ju Jang, Haneul Kim, Kyeongjae Cho, and Jinho Ahn, Membranes, 12(4), 26 March, 367 (2022)



High wet etch resistance SiO2 films deposited by plasma-enhanced atomic layer deposition with 1,1,1-tris(dimethylamino)disilane

Su Min Hwang, Harrison Sejoon Kim, Dan N. Le, Akshay Sahota, Jaebeom Lee, Yong Chan Jung, Sang Woo Kim, Si Joon Kim, Rino Choi, Jinho Ahn, Byung Keun Hwang, Xiaobing Zhou, and Jiyoung Kim, Journal of Vacuum Science & Technology A, 40(2), 11 February, 22406 (2022)



Impact of thermal expansion coefficient on the local tilt angle of extreme ultraviolet pellicle

Junghwan Kim, Haneul Kim, Jinho Ahn, Journal of Micro/Nanopatterning, MEMS, and MOEMS, 21(1), 01 February, 14401 (2022)



Microstructures of HfOx Films Prepared via Atomic Layer Deposition Using La(NO3)3·6H2O Oxidants

Seon Yong Kim, Yong Chan Jung, Sejong Seong, Taehoon Lee, In-Sung Park and Jinho Ahn, Materials, 14(23), 06 December, 7478 (2021)



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